Gas flow sensing for low-flow applications
The FS1012-1100-NG: Rated for a 3 V supply, it integrates into a low-voltage instrumentation rail without a separate regulator.
What the 0 to 10 SLPM range means for your BOM
The silicon enclosure is the sensing-element interface — the thermal island and the flow channel are micromachined into the silicon die. This construction gives a fast thermal response time (typically tens of milliseconds), which matters when the flow changes abruptly, such as in a breath-by-breath ventilator cycle or a pulsed gas delivery system.
Renesas lists the FS1012-1100-NG as Active, meaning the manufacturer continues to produce and support the part for new designs.